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Precision Nanometrology

Part of the Springer Series in Advanced Manufacturing Book Series (volume 0)

DOI: 10.1007/978-1-84996-254-4

ISBN: 978-1-84996-253-7

Publisher: Springer London - Springer Journals

Jan 1, 2010

1 - 10 of 10 Chapters

Available

Angle Sensor for Measurement of Surface Slope and Tilt Motion

Pages: 1 –33

[Angle is one of the most fundamental quantities for precision nanometrology. Angle sensors based on the principle of autocollimation, which are conventionally called autocollimators, can accurately measure small tilt angles of a light-reflecting flat surface [1]. Autocollimators have a long...
Available

Laser Autocollimator for Measurement of Multi-axis Tilt Motion

Pages: 35 –67

[Precision stages used in nanomanufacturing, including linear stages and rotary stages, have multi-axis tilt error motions. For a linear stage, the tilt error motions are referred to as the pitch, yaw and roll error motions, which cause unexpected Abbe errors [1, 2]. It is necessary to measure...
Available

Surface Encoder for Measurement of In-plane Motion

Pages: 69 –108

[Precision planar motion (XY) stages are widely used in machine tools, photolithography equipment and measuring instruments for nanomanufacturing [1–4]. Measurement of the in-plane motions is essential for evaluation of stage performance and/or for feedback control of the stage. In addition to...
Available

Grating Encoder for Measurement of In-plane and Out-of-plane Motion

Pages: 109 –141

[In nanomanufacturing, it is necessary to generate not only XY in-plane motions but also Z-directional out-of-plane motions [1]. A lot of stages employed for generation of both in-plane and out-of-plane motions require large strokes in the XY-axes and a relatively small stroke in the Z-axis....
Available

Scanning Multi-probe System for Measurement of Roundness

Pages: 143 –173

[Roundness is one of the most fundamental geometries of precision workpieces. Most of the round-shaped precision workpieces are manufactured by a turning process, in which a spindle is employed to rotate the workpiece. The out-of-roundness of the workpiece is basically determined by the error...
Available

Scanning Error Separation System for Measurement of Straightness

Pages: 175 –210

[The straightness is another fundamental geometric parameter of precision workpieces. The straightness of a workpiece surface can be measured by scanning a displacement sensor or a slope sensor over the workpiece surface by a linear stage (slide). Because the axis of motion of the linear stage...
Available

Scanning Micro-stylus System for Measurement of Micro-aspherics

Pages: 211 –243

[Aspheric micro-lenses are key components in medical endoscopes for diagnosis and surgery of internal organs [1, 2]. The diameter of the micro-lens is less than 1 mm for fitting into the thin endoscope tube. The aspheric surface of the lens makes it possible to improve the imaging performance of...
Available

Large Area Scanning Probe Microscope for Micro-textured Surfaces

Pages: 245 –281

[Large area three-dimensional (3D) micro-structured surfaces can be found in holograms, diffractive optical elements (DOEs) and anti-reflective films, etc. [1]. A large number of the surfaces are composed of periodical micro-structures with a small structure width (in the X- and Y-directions)...
Available

Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures

Pages: 283 –319

[Nanostructures with dimensions on the order of 1 to 100 nm represented by the nanoedge of a single point diamond cutting tool can be made by nanomanufacturing. The diamond cutting tool is used in ultra-precision cutting to fabricate precision workpieces [1–5]. As shown in Figure 9.1, the tool...
Available

Scanning Image-sensor System for Measurement of Micro-dimensions

Pages: 321 –351

[Measurement of micro-dimensions such as length, depth, width and radius of the nanomanufactured micro-structures is an important task for precision nanometrology. Some of the micro-structures are made on the workpiece over a long stroke and the measurement of the micro-dimension must be made...

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