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Micro and Smart Devices and Systems

Part of the Springer Tracts in Mechanical Engineering Book Series

Editors: Vinoy, K. J.; Ananthasuresh, G. K.; Pratap, Rudra; Krupanidhi, S. B.

DOI: 10.1007/978-81-322-1913-2

ISBN: 978-81-322-1912-5

Publisher: Springer India - Springer Journals

May 22, 2014

1 - 10 of 29 Chapters

Available

Design, Development, Fabrication, Packaging, and Testing of MEMS Pressure Sensors for Aerospace Applications

Bhat, K. N.; Nayak, M. M.; Kumar, Vijay; Thomas, Linet; Manish, S.; Thyagarajan, Vijay; Pandian,; Jeyabal,; Gaurav, Shyam; Gurudat,; Bhat, Navakanta; Pratap, Rudra

Pages: 3 –17

[In this chapter we present the design, fabrication, packaging, and calibration of silicon micro machined piezo-resistive pressure sensors for operation in the pressure range of 1.2–400 bar. Based on the detailed Finite Element Analysis (FEA), the diaphragm dimensions and the optimized locations...
Available

MEMS Piezoresistive Accelerometers

Bhattacharyya, Tarun Kanti; Roy, Anindya Lal

Pages: 19 –34

[MEMS piezoresistive accelerometers are inertial sensors which measure acceleration of the reference frame to which they are attached. These devices provide extremely localized acceleration-induced stress sensing with low noise outputs and have been the subject of academic as well as commercial...
Available

A Handheld Explosives Detector Based on Amplifying Fluorescent Polymer

Kumar, Anil; Sinha, Jasmine; Majji, Ashok K.; Raviprakash, J.; Viswanathan, Sathyadeep; Paul, Justin K.; Mohan, S. Vijay; Sanjeeva, Shilpa K.; Korrapati, Swathi; Nair, Chandrashekhar B.

Pages: 35 –47

[Explosive detection has become more relevant today due to increased threats of terrorist activities and chemical warfare. In this context, amplifying fluorescent polymers, AFPs, provide an attractive platform as they are easy to synthesize and exhibit a high fluorescence quantum yield in solid...
Available

Development of a Surface Plasmon Resonance-Based Biosensing System

Mukherji, S.; Hossain, Munshi Imran; Kundu, T.; Chandratre, Deepali

Pages: 49 –72

[Surface Plasmon Resonance (SPR)-based biosensing systems have become very popular among biologists and biochemists due to their ability to sense biomolecular interaction kinetics. It can be easily surmised that such systems may be of great use in diagnostic applications as well. However, the...
Available

Design and Development of Ion-Sensitive Field-Effect Transistor and Extended-Gate Field-Effect Transistor Platforms for Chemical and Biological Sensors

Khanna, V. K.; Mukhiya, R.; Sharma, R.; Khanna, P. K.; Kumar, S.; Kharbanda, D. K.; Panchariya, P. C.; Kiranmayee, A. H.

Pages: 73 –87

[This chapter deals with the design, fabrication, packaging, and instrumentation of ISFET and EGFET devices as pH-sensing platforms for chemical and biological sensors. The ISFETs have been developed in two geometrical layouts: a twin-FET configuration on a single chip comprising ISFET and a...
Available

RF MEMS Single-Pole-Multi-Throw Switching Circuits

Koul, Shiban K.; Dey, Sukomal

Pages: 91 –109

[Radio frequency micro electromechanical system (RF MEMS) based switches are widely used in microwave and millimeter wave communication systems for their low loss, excellent linearity, low power consumption and compact size compared to other contemporary solid state devices [1]. Surface...
Available

Piezoelectric Actuators in Helicopter Active Vibration Control

Ganguli, R.; Viswamurthy, S. R.

Pages: 111 –125

[Vibration is a major problem for helicopters due to flexible rotating blades, an airspeed varying radially and temporally at each rotor blade section, and a highly unsteady aerodynamic environment due to nonuniform wake and dynamic stall. The complexity of the forcing means that efforts to...
Available

Design and Development of a Piezoelectrically Actuated Micropump for Drug Delivery Application

Eladi, Paul Braineard; Chatterjee, Dhiman; DasGupta, Amitava

Pages: 127 –141

[Micropumps form the heart of several microfluidic systems like micro total analysis system (µTAS) and drug delivery devices, which have resulted from the advancement of silicon micromachining technology. Among the different available types of micropumps, valveless micropumps are better suited...
Available

Development and Characterization of PZT Multilayered Stacks for Vibration Control

Panda, P. K.; Sahoo, B.

Pages: 143 –154

[Piezoelectric materials capable of performing both “sensing” and “actuation” belong to a class of smart materials. These materials produce electric charges on application of mechanical stress (as a sensor) or undergo dimensional change when subjected to an electric field (as an actuator). Lead...
Available

Development of Piezoelectric and Electrostatic RF MEMS Devices

Joshi, Abhay; Kshirsagar, Abhijeet; DattaGupta, S.; Natarajan, K.; Gangal, S. A.

Pages: 155 –177

[If we consider the MEMS market value breakdown, more than 4 % of the share goes to RF MEMS devices. With ever-increasing demand for optical and wireless communication, RF MEMS devices have a huge market in the coming years. Of the all RF MEMS devices, MEMS switches form the most important...

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