1 - 5 of 5 Chapters
[The first chapter introduces to the field of microelectromechanical systems (MEMS) by providing a concise coverage of microfabrication technologies, common types of microactuators with particular emphasis on electrostatic MEMS switches and motors. Classification of microswitches is provided...
[This chapter presents 3-D FE modeling and simulation of dynamics of microcantilever operating in ambient air near fixed surface. The phenomenon of squeeze-film damping is further analyzed numerically. Frequency response and transient analyses are carried out in order to determine influence of...
[In this chapter the main ideas of the application of the finite element method for analysis of elastic microsystems are related to the theories of nonlinear vibro-impact oscillations, optimal control and design. The results obtained during simulations indicate that structural parameters of...
[This chapter is dedicated to analytical and numerical analysis of electrostatic micromotor with focus on key aspects of its design and control. FE modeling and simulation is reported providing results of vibration analysis of the rotor in vacuum and viscous medium. Analytical dynamic micromotor...
[The last chapter presents the developed surface-micromachining technology that was patented by the authors and is suitable for fabrication of various MEMS actuators and sensors. Peculiarities of the microtechnology are highlighted such as utilization of special fractal microstructures, which...
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