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It has become an irreversible trend in recent years that the semiconductor wafer fabrication requires shorter processing time, greater flexibility and lower capital cost. Rapid thermal processing (RTP) has demonstrated its potential to meet such requirements while becoming a key process for...
Self-heating occurs in integrated circuits, specially for SOI-based devices. Naturally, the heat distribution affects the circuit’s functionality. For reliable designs in SOI-chip technology, and other applications, the thermal aspects have to be addressed. Therefore we develop a model, which is...
This paper describes a new dynamic model for a waterjet cutting system that includes a double-acting reciprocating intensifier pump. Since the system operates at high pressures the fluid flow is assumed to be compressible. The dynamic model includes the characteristics of the intensifier pump,...
An object-oriented methodology for the design of reusable model libraries, dedicated to the composition of hybrid simulation models, is proposed. It takes into consideration all the phases of the library life cycle: design, programming, maintenance, modifications, extension, etc. The methodology...
A novel object-oriented methodology for the design of model libraries is exemplified by means of the design of JARA. JARA is a set of libraries of dynamic hybrid models of some fundamental physical-chemical principles. Its main application field is the modeling of physical-chemical processes in...
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