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Robust control of micro-positioning stage with piezoceramic actuator

Robust control of micro-positioning stage with piezoceramic actuator A non-linear robust control strategy for piezoceramic actuator in a micro-positioning stage is proposed in this paper. In order to describe the relations among the amplifier-filter circuit, piezoceramic actuator and load, a sandwich model with hysteresis is developed. For the compensation of hysteresis effect in piezoceramic actuator, the corresponding inverse model of hysteresis is constructed. Then, a non-linear robust control strategy based on the sandwich model with hysteresis is proposed. The experimental results show that the proposed control scheme has obtained promising results. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png International Journal of Advanced Mechatronic Systems Inderscience Publishers

Robust control of micro-positioning stage with piezoceramic actuator

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Publisher
Inderscience Publishers
Copyright
Copyright © Inderscience Enterprises Ltd. All rights reserved
ISSN
1756-8412
eISSN
1756-8420
DOI
10.1504/IJAMECHS.2012.052216
Publisher site
See Article on Publisher Site

Abstract

A non-linear robust control strategy for piezoceramic actuator in a micro-positioning stage is proposed in this paper. In order to describe the relations among the amplifier-filter circuit, piezoceramic actuator and load, a sandwich model with hysteresis is developed. For the compensation of hysteresis effect in piezoceramic actuator, the corresponding inverse model of hysteresis is constructed. Then, a non-linear robust control strategy based on the sandwich model with hysteresis is proposed. The experimental results show that the proposed control scheme has obtained promising results.

Journal

International Journal of Advanced Mechatronic SystemsInderscience Publishers

Published: Jan 1, 2012

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