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An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators

An elastic electrode model for wave propagation analysis in piezoelectric layered structures of... Abstract Wave propagation in a piezoelectric layered structure of a film bulk acoustic resonator (FBAR) is studied. The accurate results of dispersion relation are calculated using the proposed elastic electrode model for both electroded and unelectroded layered plates. The differences of calculated cut-off frequencies between the current elastic electrode model and the simplified inertial electrode model (often used in the quartz resonator analysis) are illustrated in detail, which shows that an elastic electrode model is indeed needed for the accurate analysis of FBAR. These results can be used as an accurate criterion to calibrate the 2-D theoretical model for a real finite-size structure of FBAR. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Acta Mechanica Solida Sinica Springer Journals

An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators

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Publisher
Springer Journals
Copyright
2017 The Chinese Society of Theoretical and Applied Mechanics and Technology
ISSN
0894-9166
eISSN
1860-2134
DOI
10.1016/j.camss.2017.04.001
Publisher site
See Article on Publisher Site

Abstract

Abstract Wave propagation in a piezoelectric layered structure of a film bulk acoustic resonator (FBAR) is studied. The accurate results of dispersion relation are calculated using the proposed elastic electrode model for both electroded and unelectroded layered plates. The differences of calculated cut-off frequencies between the current elastic electrode model and the simplified inertial electrode model (often used in the quartz resonator analysis) are illustrated in detail, which shows that an elastic electrode model is indeed needed for the accurate analysis of FBAR. These results can be used as an accurate criterion to calibrate the 2-D theoretical model for a real finite-size structure of FBAR.

Journal

Acta Mechanica Solida Sinica – Springer Journals

Published: Jun 1, 2017

Keywords: theoretical and applied mechanics; surfaces and interfaces, thin films; classical mechanics

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