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Effective Method of Producing Gas-Impermeable SiC-Coatings

Effective Method of Producing Gas-Impermeable SiC-Coatings Some problems of producing high purity silicon carbide coatings by chemical vapour deposition with recirculation of raw material (methyltrichlorosilane) were considered. Recirculating technology provides high deposition rate (up to 1 mm/h) without reducing of total yield and limits the environment contamination. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Advanced Performance Materials Springer Journals

Effective Method of Producing Gas-Impermeable SiC-Coatings

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Publisher
Springer Journals
Copyright
Copyright © 1997 by Kluwer Academic Publishers
Subject
Engineering; Automotive Engineering; Characterization and Evaluation of Materials; Classical Mechanics; Metallic Materials
ISSN
0929-1881
eISSN
1572-8765
DOI
10.1023/A:1008643529637
Publisher site
See Article on Publisher Site

Abstract

Some problems of producing high purity silicon carbide coatings by chemical vapour deposition with recirculation of raw material (methyltrichlorosilane) were considered. Recirculating technology provides high deposition rate (up to 1 mm/h) without reducing of total yield and limits the environment contamination.

Journal

Advanced Performance Materials – Springer Journals

Published: Sep 28, 2004

References

  • Silicon Carbide
    Ivanova, L.M.