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From scientific instrument to industrial machineFocusing Control

From scientific instrument to industrial machine: Focusing Control [Creating sharp images on a transmission electron microscope involves extremely precise setting of the electromagnetic focusing elements in the system. In the context of focus control it is useful to distinguish coarse and fine grain setting regimes, as these have different requirements. Coarse grain focus setting by electromagnetic lenses is difficult, mainly due to hysteresis caused by the iron constituents of the lens. This chapter describes an approach to control and optimize the coarse-grain setting of focus, including an explicit trade-off analysis of speed versus accuracy. In fine-grain setting the challenges reside mainly in image-based multi-parameter optimization of image sharpness, which is influenced by both lens and stigmator settings. This chapter also describes methods to optimize for focus and astigmatism, and their application in measurement procedures.] http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png

From scientific instrument to industrial machineFocusing Control

Part of the SpringerBriefs in Electrical and Computer Engineering Book Series
Editors: Doornbos, Richard; van Loo, Sjir
Doornbos, Richard; van Loo, Sjir
From scientific instrument to industrial machine — Apr 28, 2012
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17 pages

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Publisher
Springer Netherlands
Copyright
© The Author(s) 2012
ISBN
978-94-007-4146-1
Pages
63 –79
DOI
10.1007/978-94-007-4147-8_6
Publisher site
See Chapter on Publisher Site

Abstract

[Creating sharp images on a transmission electron microscope involves extremely precise setting of the electromagnetic focusing elements in the system. In the context of focus control it is useful to distinguish coarse and fine grain setting regimes, as these have different requirements. Coarse grain focus setting by electromagnetic lenses is difficult, mainly due to hysteresis caused by the iron constituents of the lens. This chapter describes an approach to control and optimize the coarse-grain setting of focus, including an explicit trade-off analysis of speed versus accuracy. In fine-grain setting the challenges reside mainly in image-based multi-parameter optimization of image sharpness, which is influenced by both lens and stigmator settings. This chapter also describes methods to optimize for focus and astigmatism, and their application in measurement procedures.]

Published: Apr 28, 2012

Keywords: Defocus control; Image sharpness; Electromagnetic lens; Hysteresis; Trade-off analysis; Astigmatism; Sharpness function; Multi-parameter optimization; Nelder-Mead simplex method

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