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Micro and Smart Devices and SystemsDesign and Development of Ion-Sensitive Field-Effect Transistor and Extended-Gate Field-Effect Transistor Platforms for Chemical and Biological Sensors

Micro and Smart Devices and Systems: Design and Development of Ion-Sensitive Field-Effect... [This chapter deals with the design, fabrication, packaging, and instrumentation of ISFET and EGFET devices as pH-sensing platforms for chemical and biological sensors. The ISFETs have been developed in two geometrical layouts: a twin-FET configuration on a single chip comprising ISFET and a reference field-effect transistor (REFET); and a single ISFET with linear gate geometry. Packaging challenges have been successfully overcome by thick film alumina and low-temperature cofired ceramic (LTCC) technologies. Characterization studies have been performed on ISFETs. An ISFET-based pH meter, consisting of a sensor probe, a signal conditioning circuit, microcontroller, and display has been developed. The study has been carried out on a pH-sensitive extended gate electrode with a Ta2O5 sensing film by connecting it to a standard MOSFET gate to develop an EGFET device.] http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png

Micro and Smart Devices and SystemsDesign and Development of Ion-Sensitive Field-Effect Transistor and Extended-Gate Field-Effect Transistor Platforms for Chemical and Biological Sensors

Part of the Springer Tracts in Mechanical Engineering Book Series
Editors: Vinoy, K. J.; Ananthasuresh, G. K.; Pratap, Rudra; Krupanidhi, S. B.
Khanna, V. K.; Mukhiya, R.; Sharma, R.; Khanna, P. K.; Kumar, S.; Kharbanda, D. K.; Panchariya, P. C.; Kiranmayee, A. H.
Micro and Smart Devices and Systems — May 22, 2014
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Publisher
Springer India
Copyright
© Springer India 2014
ISBN
978-81-322-1912-5
Pages
73 –87
DOI
10.1007/978-81-322-1913-2_5
Publisher site
See Chapter on Publisher Site

Abstract

[This chapter deals with the design, fabrication, packaging, and instrumentation of ISFET and EGFET devices as pH-sensing platforms for chemical and biological sensors. The ISFETs have been developed in two geometrical layouts: a twin-FET configuration on a single chip comprising ISFET and a reference field-effect transistor (REFET); and a single ISFET with linear gate geometry. Packaging challenges have been successfully overcome by thick film alumina and low-temperature cofired ceramic (LTCC) technologies. Characterization studies have been performed on ISFETs. An ISFET-based pH meter, consisting of a sensor probe, a signal conditioning circuit, microcontroller, and display has been developed. The study has been carried out on a pH-sensitive extended gate electrode with a Ta2O5 sensing film by connecting it to a standard MOSFET gate to develop an EGFET device.]

Published: May 22, 2014

Keywords: ISFET; EGFET; pH sensor; Thick-film packaging; LTCC packaging; pH meter

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