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Micro and Smart Devices and SystemsDevelopment of Piezoelectric and Electrostatic RF MEMS Devices

Micro and Smart Devices and Systems: Development of Piezoelectric and Electrostatic RF MEMS Devices [If we consider the MEMS market value breakdown, more than 4 % of the share goes to RF MEMS devices. With ever-increasing demand for optical and wireless communication, RF MEMS devices have a huge market in the coming years. Of the all RF MEMS devices, MEMS switches form the most important building block. With all the 32 types of MEMS switch configurations present, only switches with electrostatic and piezoelectric actuation are the most mature and present in the commercial market. This chapter focuses on design, simulation, optimization, and fabrication of MEMS switches. The chapter discusses two types of electrostatic switches, low process temperature, low stress electrostatic RF MEMS switch and all metal RF MEMS switches and one type of piezoelectric RF MEMS switch.] http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png

Micro and Smart Devices and SystemsDevelopment of Piezoelectric and Electrostatic RF MEMS Devices

Part of the Springer Tracts in Mechanical Engineering Book Series
Editors: Vinoy, K. J.; Ananthasuresh, G. K.; Pratap, Rudra; Krupanidhi, S. B.
Joshi, Abhay; Kshirsagar, Abhijeet; DattaGupta, S.; Natarajan, K.; Gangal, S. A.
Micro and Smart Devices and Systems — May 22, 2014
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22 pages

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Publisher
Springer India
Copyright
© Springer India 2014
ISBN
978-81-322-1912-5
Pages
155 –177
DOI
10.1007/978-81-322-1913-2_10
Publisher site
See Chapter on Publisher Site

Abstract

[If we consider the MEMS market value breakdown, more than 4 % of the share goes to RF MEMS devices. With ever-increasing demand for optical and wireless communication, RF MEMS devices have a huge market in the coming years. Of the all RF MEMS devices, MEMS switches form the most important building block. With all the 32 types of MEMS switch configurations present, only switches with electrostatic and piezoelectric actuation are the most mature and present in the commercial market. This chapter focuses on design, simulation, optimization, and fabrication of MEMS switches. The chapter discusses two types of electrostatic switches, low process temperature, low stress electrostatic RF MEMS switch and all metal RF MEMS switches and one type of piezoelectric RF MEMS switch.]

Published: May 22, 2014

Keywords: Piezoelectric switch; Electrostatic switch; Low process temperature; Surface micromachining; Design optimization; PZT; SiN

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