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Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips

Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microelectronic Engineering Unpaywall

Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips

Microelectronic EngineeringJan 1, 2020
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Publisher
Unpaywall
ISSN
0167-9317
DOI
10.1016/j.mee.2019.111157
Publisher site
See Article on Publisher Site

Abstract

Journal

Microelectronic EngineeringUnpaywall

Published: Jan 1, 2020

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